IR-VASE® Data Acquisition & Analysis Online Short Course
WHERE:
Online
WHEN:
April 7, 9, 14, 16, 21, 23, 28, 30 – 2020
8 sessions
TIME (adjust for your time zone):
1:00-3:00 PM US CDT (GMT-5)
Each session will be 1.5 to 2 hours
WHO:
IR-VASE Customers
COST:
$500 Standard Price
$250 University Price
IR ellipsometry data acquisition and analysis requires unique skills that are different than UV/visible wavelength ellipsometry. We are offering this Internet-based course to help our IR-VASE® customers develop these skills. The course will consist of an Introduction to Ellipsometry session on September 8th, followed by seven sessions – two sessions per week over 4 weeks.
Course Details
Each registered participant will be invited to participate in sessions, and to view recordings of each session afterwards. In addition to internet-sessions, students will receive relevant example data sets to practice. Homework can be sent to the instructor as a WVASE Environment file for review prior to the next session. Registered participants who submit >70% of the homework will receive a certificate of participation.
For most sessions, the course will follow the WVASE® Software Training Manual for IR-VASE, and will use a number of examples from that manual. PDF copies of the manual will be made available to participants.
Internet conferencing
Participants must have internet access to participate in the webinar so they can log onto the course via GoToWebinar. For audio, participants can either call one of the numbers provided by GoToWebinar at the time of the session, or access audio from their computer via a VoIP connection from GoToWebinar. Participants who are from the same organization/facility are welcome to participate from a conference room using a commonly shared computer, projector and audio connection.
Recordings of all sessions will made available to participants during the course and for a period afterwards.
For more information please contact Tom Tiwald at ttiwald@jawoollam.com
Register below to reserve your spot now. Space is limited.
SCHEDULE
April 7
Session 1: Introduction to Ellipsometry
- Theory
- Light & polarization
- Instrumentation
- Light & materials
- Interfaces & films
- Intro to Modeling & Analysis
- Intro to WVASE analysis software
April 9
Session 2: IR-VASE Sample Preparation & Data Acquisition
- IR-VASE Scan dialog box
- Choosing acquisition parameters
- Backside reflections & Backside roughening
- Beam size & masking
April 14
Session 3: Transparent & Absorbing Substrates
- Genosc layer for IR data
- Data simulation
- Surface Roughness
- Pt-by-pt fit
- Oscillators for Absorption
April 16
Session 4: Transparent & Absorbing Films
- Interpreting Ψ oscillations: index contrast & thickness
- Gaussian & Lorentz oscillators
- Point-by-point fit & Gen-Osc layer
April 21
Session 5: Free Carrier Effects (doping)
- Drude model
- Effect sensitivity for IR wavelengths
- Fitting doped substrates & layers
April 23
Session 6: Non-Ideal Samples & Measurements
- Grading
- Measurement non-idealities: effects on Ψ & Δ
- %Depolarization
April 28
Session 7: Advanced Topics
- Multisample (Multi-dataset) Analysis
- Analysis of combined IR-VASE & UV-visible-NIR data
- Analysis of combined ellipsometric & transmission data
- Separate angle analysis example
April 30
Session 8: Anisotropy
- Description
- Measurement
- Building Anisotropic models
- Simultaneous analysis of multiple samples and/or sample orientations